Products Cylinder Sizes Gas Mixtures EnvironmentalStandards
Laser GasMixtures
Specialty GasEquipment
Excimer Laser Gas Mixtures
Scientific Gases offers a complete line of excimer laser mixes and premixes for microlithography, material processing, and laser vision correction. These mixtures are supplied in specially prepared cylinders to guarantee accuracy and stability.
These mixtures include the following components in various concentrations as required:
Fluorine Mixtures: Note: If fluorine concentration exceeds 1%, pressure is limited to 1000 psig, and contents will be less. For example:
Hydrogen Chloride Mixtures:
Recommended Regulator:
Components
Cylinder Size
Contents
Pressure
CGA Valve
Fluorine
Krypton
Neon 200 (44L)
80 (16L) 5000 L
2000 L1800 psig
2000 psig 679
Fluorine
Argon
Neon 200 (44L)
80 (16L) 5000 L
2000 L1800 psig
2000 psig 679
Fluorine
Argon
Helium
Neon 200 (44L)
80 (16L) 6000 L
2000 L2150 psig
2000 psig 679
These mixtures can also be supplied at 500 psig if required.
Components
Cylinder Size
Contents
Pressure
CGA Valve
5% Fluorine
95% Neon 200 (44L)
80 (16L) 3000 L
1000 L1000 psig
1000 psig 679
Components
Cylinder Size
Contents
Pressure
CGA Valve
5% HCI
95% Helium 200 (44L)
2000 L
2000 psig
330
5% HCI
1% H2
94%He 200 (44L)
2000 L
2000 psig
330
5% HCI
1% H2
94% Neon 200 (44L)
2000 L
2000 psig
330
Please inquire for the proper regulator for these mixtures. Special passivation may be required.
